{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pd", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on Pd(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1449, "q": 5.398, "mu": 2.341, "epsilonL": 1.422e-05, "Eth": 15.95}, "E_min": 15.95, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
15.95	0.0	
19.07	0.0001355	
22.79	0.001016	
27.24	0.003875	
32.56	0.01109	
38.92	0.02665	
46.53	0.05577	
55.62	0.1026	
66.48	0.1667	
79.47	0.2413	
94.99	0.318	
113.6	0.391	
135.7	0.4588	
162.2	0.5225	
193.9	0.5838	
231.8	0.6445	
277.1	0.7057	
331.3	0.7682	
396.0	0.8325	
473.3	0.8988	
565.8	0.9672	
676.3	1.037	
808.4	1.109	
966.3	1.183	
1155.0	1.258	
1381.0	1.333	
1650.0	1.408	
1973.0	1.483	
2358.0	1.557	
2819.0	1.63	
3370.0	1.701	
4028.0	1.768	
4815.0	1.832	
5755.0	1.891	
6880.0	1.945	
8224.0	1.993	
9830.0	2.034	
11750.0	2.067	
14050.0	2.092	
16790.0	2.106	
20070.0	2.111	
23990.0	2.105	
28680.0	2.088	
34280.0	2.059	
40980.0	2.019	
48980.0	1.967	
58550.0	1.906	
69990.0	1.834	
83660.0	1.754	
-----