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Plasma-Surface Interaction Data Set 375

Sputtering of 4He+ on Pd(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on Pd(pc) at 300 K

angle = 0.0 deg E /eV P
34.331.406e-32
40.40.0002445
47.540.001228
55.950.003519
65.840.007836
77.480.0148
91.170.02454
107.30.03635
126.30.04899
148.60.0612
174.90.07223
205.80.08186
242.10.09023
285.00.09756
335.30.1041
394.60.11
464.40.1155
546.50.1205
643.10.1252
756.80.1296
890.60.1337
1048.00.1373
1233.00.1406
1451.00.1435
1708.00.1459
2010.00.1478
2365.00.1492
2783.00.1499
3276.00.1501
3855.00.1496
4536.00.1485
5338.00.1467
6282.00.1442
7392.00.141
8699.00.1372
10240.00.1328
12050.00.1279
14180.00.1225
16680.00.1167
19630.00.1106
23100.00.1043
27190.00.09783
32000.00.09135
37650.00.08491
44310.00.07857
52140.00.07239
61360.00.06644
72210.00.06074
84980.00.05533

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 34.33 – 100000