{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pd", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of (4He)+ on Pd(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1312, "q": 0.3839, "mu": 1.891, "epsilonL": 8.974e-05, "Eth": 34.33}, "E_min": 34.33, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
34.33	1.406e-32	
40.4	0.0002445	
47.54	0.001228	
55.95	0.003519	
65.84	0.007836	
77.48	0.0148	
91.17	0.02454	
107.3	0.03635	
126.3	0.04899	
148.6	0.0612	
174.9	0.07223	
205.8	0.08186	
242.1	0.09023	
285.0	0.09756	
335.3	0.1041	
394.6	0.11	
464.4	0.1155	
546.5	0.1205	
643.1	0.1252	
756.8	0.1296	
890.6	0.1337	
1048.0	0.1373	
1233.0	0.1406	
1451.0	0.1435	
1708.0	0.1459	
2010.0	0.1478	
2365.0	0.1492	
2783.0	0.1499	
3276.0	0.1501	
3855.0	0.1496	
4536.0	0.1485	
5338.0	0.1467	
6282.0	0.1442	
7392.0	0.141	
8699.0	0.1372	
10240.0	0.1328	
12050.0	0.1279	
14180.0	0.1225	
16680.0	0.1167	
19630.0	0.1106	
23100.0	0.1043	
27190.0	0.09783	
32000.0	0.09135	
37650.0	0.08491	
44310.0	0.07857	
52140.0	0.07239	
61360.0	0.06644	
72210.0	0.06074	
84980.0	0.05533	
-----