{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pd", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"34.33": {"P": 1.406e-32}, "40.4": {"P": 0.0002445}, "47.54": {"P": 0.001228}, "55.95": {"P": 0.003519}, "65.84": {"P": 0.007836}, "77.48": {"P": 0.0148}, "91.17": {"P": 0.02454}, "107.3": {"P": 0.03635}, "126.3": {"P": 0.04899}, "148.6": {"P": 0.0612}, "174.9": {"P": 0.07223}, "205.8": {"P": 0.08186}, "242.1": {"P": 0.09023}, "285.0": {"P": 0.09756}, "335.3": {"P": 0.1041}, "394.6": {"P": 0.11}, "464.4": {"P": 0.1155}, "546.5": {"P": 0.1205}, "643.1": {"P": 0.1252}, "756.8": {"P": 0.1296}, "890.6": {"P": 0.1337}, "1048.0": {"P": 0.1373}, "1233.0": {"P": 0.1406}, "1451.0": {"P": 0.1435}, "1708.0": {"P": 0.1459}, "2010.0": {"P": 0.1478}, "2365.0": {"P": 0.1492}, "2783.0": {"P": 0.1499}, "3276.0": {"P": 0.1501}, "3855.0": {"P": 0.1496}, "4536.0": {"P": 0.1485}, "5338.0": {"P": 0.1467}, "6282.0": {"P": 0.1442}, "7392.0": {"P": 0.141}, "8699.0": {"P": 0.1372}, "10240.0": {"P": 0.1328}, "12050.0": {"P": 0.1279}, "14180.0": {"P": 0.1225}, "16680.0": {"P": 0.1167}, "19630.0": {"P": 0.1106}, "23100.0": {"P": 0.1043}, "27190.0": {"P": 0.09783}, "32000.0": {"P": 0.09135}, "37650.0": {"P": 0.08491}, "44310.0": {"P": 0.07857}, "52140.0": {"P": 0.07239}, "61360.0": {"P": 0.06644}, "72210.0": {"P": 0.06074}, "84980.0": {"P": 0.05533}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1312, "q": 0.3839, "mu": 1.891, "epsilonL": 8.974e-05, "Eth": 34.33}, "E_min": 34.33, "E_max": 100000}}]}