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Plasma-Surface Interaction Data Set 371

Sputtering of H+ on Pd(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Pd(pc) at 300 K

angle = 0.0 deg E /eV P
119.49.329e-28
136.96.197e-05
157.10.0002305
180.20.0005387
206.80.001028
237.20.001729
272.10.002649
312.20.003754
358.20.004971
410.90.006206
471.40.007372
540.80.008407
620.40.009284
711.80.009999
816.60.01056
936.90.011
1075.00.01133
1233.00.01156
1415.00.01171
1623.00.01179
1862.00.01181
2136.00.01178
2451.00.01169
2811.00.01156
3225.00.01138
3700.00.01116
4245.00.01091
4870.00.01061
5587.00.01028
6410.00.00993
7354.00.009551
8437.00.009152
9679.00.008737
11100.00.00831
12740.00.007876
14620.00.007439
16770.00.007003
19240.00.006571
22070.00.006147
25320.00.005733
29050.00.005331
33320.00.004945
38230.00.004575
43860.00.004222
50320.00.003887
57730.00.003571
66230.00.003274
75980.00.002995
87170.00.002736

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 119.4 – 100000