{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pd", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"119.4": {"P": 9.329e-28}, "136.9": {"P": 6.197e-05}, "157.1": {"P": 0.0002305}, "180.2": {"P": 0.0005387}, "206.8": {"P": 0.001028}, "237.2": {"P": 0.001729}, "272.1": {"P": 0.002649}, "312.2": {"P": 0.003754}, "358.2": {"P": 0.004971}, "410.9": {"P": 0.006206}, "471.4": {"P": 0.007372}, "540.8": {"P": 0.008407}, "620.4": {"P": 0.009284}, "711.8": {"P": 0.009999}, "816.6": {"P": 0.01056}, "936.9": {"P": 0.011}, "1075.0": {"P": 0.01133}, "1233.0": {"P": 0.01156}, "1415.0": {"P": 0.01171}, "1623.0": {"P": 0.01179}, "1862.0": {"P": 0.01181}, "2136.0": {"P": 0.01178}, "2451.0": {"P": 0.01169}, "2811.0": {"P": 0.01156}, "3225.0": {"P": 0.01138}, "3700.0": {"P": 0.01116}, "4245.0": {"P": 0.01091}, "4870.0": {"P": 0.01061}, "5587.0": {"P": 0.01028}, "6410.0": {"P": 0.00993}, "7354.0": {"P": 0.009551}, "8437.0": {"P": 0.009152}, "9679.0": {"P": 0.008737}, "11100.0": {"P": 0.00831}, "12740.0": {"P": 0.007876}, "14620.0": {"P": 0.007439}, "16770.0": {"P": 0.007003}, "19240.0": {"P": 0.006571}, "22070.0": {"P": 0.006147}, "25320.0": {"P": 0.005733}, "29050.0": {"P": 0.005331}, "33320.0": {"P": 0.004945}, "38230.0": {"P": 0.004575}, "43860.0": {"P": 0.004222}, "50320.0": {"P": 0.003887}, "57730.0": {"P": 0.003571}, "66230.0": {"P": 0.003274}, "75980.0": {"P": 0.002995}, "87170.0": {"P": 0.002736}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3805, "q": 0.0307, "mu": 1.568, "epsilonL": 0.0001883, "Eth": 119.4}, "E_min": 119.4, "E_max": 100000}}]}