{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pd", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of H+ on Pd(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3805, "q": 0.0307, "mu": 1.568, "epsilonL": 0.0001883, "Eth": 119.4}, "E_min": 119.4, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
119.4	9.329e-28	
136.9	6.197e-05	
157.1	0.0002305	
180.2	0.0005387	
206.8	0.001028	
237.2	0.001729	
272.1	0.002649	
312.2	0.003754	
358.2	0.004971	
410.9	0.006206	
471.4	0.007372	
540.8	0.008407	
620.4	0.009284	
711.8	0.009999	
816.6	0.01056	
936.9	0.011	
1075.0	0.01133	
1233.0	0.01156	
1415.0	0.01171	
1623.0	0.01179	
1862.0	0.01181	
2136.0	0.01178	
2451.0	0.01169	
2811.0	0.01156	
3225.0	0.01138	
3700.0	0.01116	
4245.0	0.01091	
4870.0	0.01061	
5587.0	0.01028	
6410.0	0.00993	
7354.0	0.009551	
8437.0	0.009152	
9679.0	0.008737	
11100.0	0.00831	
12740.0	0.007876	
14620.0	0.007439	
16770.0	0.007003	
19240.0	0.006571	
22070.0	0.006147	
25320.0	0.005733	
29050.0	0.005331	
33320.0	0.004945	
38230.0	0.004575	
43860.0	0.004222	
50320.0	0.003887	
57730.0	0.003571	
66230.0	0.003274	
75980.0	0.002995	
87170.0	0.002736	
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