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Plasma-Surface Interaction Data Set 365

Sputtering of 3He+ on Rh(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Rh(pc) at 300 K

angle = 0.0 deg E /eV P
64.985.871e-27
75.480.0003548
87.680.001304
101.80.003038
118.30.005783
137.40.009697
159.60.01478
185.40.02082
215.40.02741
250.20.0341
290.60.0405
337.50.04635
392.00.05156
455.40.05611
529.00.06008
614.40.06354
713.70.06656
829.00.0692
963.00.07152
1119.00.07354
1299.00.07529
1509.00.07676
1753.00.07797
2036.00.07891
2365.00.07958
2747.00.07995
3191.00.08004
3707.00.07982
4306.00.07929
5002.00.07845
5810.00.0773
6748.00.07585
7839.00.0741
9105.00.07207
10580.00.06979
12280.00.06728
14270.00.06456
16580.00.06168
19250.00.05867
22360.00.05557
25980.00.05241
30170.00.04923
35050.00.04606
40710.00.04293
47290.00.03986
54930.00.03689
63810.00.03403
74120.00.03129
86090.00.02869

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 64.98 – 100000