{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Rh", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"64.98": {"P": 5.871e-27}, "75.48": {"P": 0.0003548}, "87.68": {"P": 0.001304}, "101.8": {"P": 0.003038}, "118.3": {"P": 0.005783}, "137.4": {"P": 0.009697}, "159.6": {"P": 0.01478}, "185.4": {"P": 0.02082}, "215.4": {"P": 0.02741}, "250.2": {"P": 0.0341}, "290.6": {"P": 0.0405}, "337.5": {"P": 0.04635}, "392.0": {"P": 0.05156}, "455.4": {"P": 0.05611}, "529.0": {"P": 0.06008}, "614.4": {"P": 0.06354}, "713.7": {"P": 0.06656}, "829.0": {"P": 0.0692}, "963.0": {"P": 0.07152}, "1119.0": {"P": 0.07354}, "1299.0": {"P": 0.07529}, "1509.0": {"P": 0.07676}, "1753.0": {"P": 0.07797}, "2036.0": {"P": 0.07891}, "2365.0": {"P": 0.07958}, "2747.0": {"P": 0.07995}, "3191.0": {"P": 0.08004}, "3707.0": {"P": 0.07982}, "4306.0": {"P": 0.07929}, "5002.0": {"P": 0.07845}, "5810.0": {"P": 0.0773}, "6748.0": {"P": 0.07585}, "7839.0": {"P": 0.0741}, "9105.0": {"P": 0.07207}, "10580.0": {"P": 0.06979}, "12280.0": {"P": 0.06728}, "14270.0": {"P": 0.06456}, "16580.0": {"P": 0.06168}, "19250.0": {"P": 0.05867}, "22360.0": {"P": 0.05557}, "25980.0": {"P": 0.05241}, "30170.0": {"P": 0.04923}, "35050.0": {"P": 0.04606}, "40710.0": {"P": 0.04293}, "47290.0": {"P": 0.03986}, "54930.0": {"P": 0.03689}, "63810.0": {"P": 0.03403}, "74120.0": {"P": 0.03129}, "86090.0": {"P": 0.02869}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1514, "q": 0.2049, "mu": 1.529, "epsilonL": 9.307e-05, "Eth": 64.98}, "E_min": 64.98, "E_max": 100000}}]}