{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Rh", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on Rh(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1514, "q": 0.2049, "mu": 1.529, "epsilonL": 9.307e-05, "Eth": 64.98}, "E_min": 64.98, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
64.98	5.871e-27	
75.48	0.0003548	
87.68	0.001304	
101.8	0.003038	
118.3	0.005783	
137.4	0.009697	
159.6	0.01478	
185.4	0.02082	
215.4	0.02741	
250.2	0.0341	
290.6	0.0405	
337.5	0.04635	
392.0	0.05156	
455.4	0.05611	
529.0	0.06008	
614.4	0.06354	
713.7	0.06656	
829.0	0.0692	
963.0	0.07152	
1119.0	0.07354	
1299.0	0.07529	
1509.0	0.07676	
1753.0	0.07797	
2036.0	0.07891	
2365.0	0.07958	
2747.0	0.07995	
3191.0	0.08004	
3707.0	0.07982	
4306.0	0.07929	
5002.0	0.07845	
5810.0	0.0773	
6748.0	0.07585	
7839.0	0.0741	
9105.0	0.07207	
10580.0	0.06979	
12280.0	0.06728	
14270.0	0.06456	
16580.0	0.06168	
19250.0	0.05867	
22360.0	0.05557	
25980.0	0.05241	
30170.0	0.04923	
35050.0	0.04606	
40710.0	0.04293	
47290.0	0.03986	
54930.0	0.03689	
63810.0	0.03403	
74120.0	0.03129	
86090.0	0.02869	
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