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Plasma-Surface Interaction Data Set 364

Sputtering of T+ on Rh(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Rh(pc) at 300 K

angle = 0.0 deg E /eV P
61.920.0
71.990.0001736
83.70.0006061
97.320.00138
113.20.002608
131.60.004402
153.00.006828
177.90.009868
206.80.01339
240.50.01718
279.60.02097
325.10.02454
378.00.02773
439.50.03048
511.00.03279
594.20.03468
690.80.0362
803.20.03741
934.00.03834
1086.00.03902
1263.00.03947
1468.00.03973
1707.00.03979
1985.00.03966
2308.00.03935
2683.00.03887
3120.00.03822
3627.00.03741
4218.00.03645
4904.00.03536
5702.00.03414
6629.00.03281
7708.00.03138
8962.00.02989
10420.00.02834
12120.00.02676
14090.00.02515
16380.00.02355
19050.00.02197
22140.00.02041
25750.00.0189
29940.00.01744
34810.00.01604
40470.00.01471
47060.00.01345
54710.00.01227
63620.00.01116
73970.00.01013
86010.00.009167

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 61.92 – 100000