{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Rh", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"61.92": {"P": 0}, "71.99": {"P": 0.0001736}, "83.7": {"P": 0.0006061}, "97.32": {"P": 0.00138}, "113.2": {"P": 0.002608}, "131.6": {"P": 0.004402}, "153.0": {"P": 0.006828}, "177.9": {"P": 0.009868}, "206.8": {"P": 0.01339}, "240.5": {"P": 0.01718}, "279.6": {"P": 0.02097}, "325.1": {"P": 0.02454}, "378.0": {"P": 0.02773}, "439.5": {"P": 0.03048}, "511.0": {"P": 0.03279}, "594.2": {"P": 0.03468}, "690.8": {"P": 0.0362}, "803.2": {"P": 0.03741}, "934.0": {"P": 0.03834}, "1086.0": {"P": 0.03902}, "1263.0": {"P": 0.03947}, "1468.0": {"P": 0.03973}, "1707.0": {"P": 0.03979}, "1985.0": {"P": 0.03966}, "2308.0": {"P": 0.03935}, "2683.0": {"P": 0.03887}, "3120.0": {"P": 0.03822}, "3627.0": {"P": 0.03741}, "4218.0": {"P": 0.03645}, "4904.0": {"P": 0.03536}, "5702.0": {"P": 0.03414}, "6629.0": {"P": 0.03281}, "7708.0": {"P": 0.03138}, "8962.0": {"P": 0.02989}, "10420.0": {"P": 0.02834}, "12120.0": {"P": 0.02676}, "14090.0": {"P": 0.02515}, "16380.0": {"P": 0.02355}, "19050.0": {"P": 0.02197}, "22140.0": {"P": 0.02041}, "25750.0": {"P": 0.0189}, "29940.0": {"P": 0.01744}, "34810.0": {"P": 0.01604}, "40470.0": {"P": 0.01471}, "47060.0": {"P": 0.01345}, "54710.0": {"P": 0.01227}, "63620.0": {"P": 0.01116}, "73970.0": {"P": 0.01013}, "86010.0": {"P": 0.009167}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.351, "q": 0.1026, "mu": 1.451, "epsilonL": 0.0001901, "Eth": 61.92}, "E_min": 61.92, "E_max": 100000}}]}