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Plasma-Surface Interaction Data Set 362

Sputtering of H+ on Rh(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Rh(pc) at 300 K

angle = 0.0 deg E /eV P
173.90.0
198.03.703e-05
225.40.0001354
256.60.0003119
292.10.0005877
332.60.0009793
378.60.00149
431.00.002105
490.70.002786
558.70.003484
636.00.00415
724.10.004745
824.40.005251
938.50.005661
1068.00.005981
1216.00.006221
1385.00.006392
1577.00.006504
1795.00.006567
2043.00.006588
2326.00.006573
2649.00.006525
3015.00.00645
3433.00.006349
3908.00.006225
4449.00.00608
5065.00.005917
5767.00.005738
6565.00.005544
7474.00.005338
8509.00.005123
9688.00.004899
11030.00.00467
12560.00.004438
14290.00.004205
16270.00.003971
18530.00.00374
21090.00.003513
24010.00.00329
27340.00.003074
31130.00.002865
35430.00.002664
40340.00.002472
45930.00.002288
52290.00.002114
59530.00.00195
67770.00.001795
77150.00.00165
87840.00.001513

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 173.9 – 100000