{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Rh", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"173.9": {"P": 0}, "198.0": {"P": 3.703e-05}, "225.4": {"P": 0.0001354}, "256.6": {"P": 0.0003119}, "292.1": {"P": 0.0005877}, "332.6": {"P": 0.0009793}, "378.6": {"P": 0.00149}, "431.0": {"P": 0.002105}, "490.7": {"P": 0.002786}, "558.7": {"P": 0.003484}, "636.0": {"P": 0.00415}, "724.1": {"P": 0.004745}, "824.4": {"P": 0.005251}, "938.5": {"P": 0.005661}, "1068.0": {"P": 0.005981}, "1216.0": {"P": 0.006221}, "1385.0": {"P": 0.006392}, "1577.0": {"P": 0.006504}, "1795.0": {"P": 0.006567}, "2043.0": {"P": 0.006588}, "2326.0": {"P": 0.006573}, "2649.0": {"P": 0.006525}, "3015.0": {"P": 0.00645}, "3433.0": {"P": 0.006349}, "3908.0": {"P": 0.006225}, "4449.0": {"P": 0.00608}, "5065.0": {"P": 0.005917}, "5767.0": {"P": 0.005738}, "6565.0": {"P": 0.005544}, "7474.0": {"P": 0.005338}, "8509.0": {"P": 0.005123}, "9688.0": {"P": 0.004899}, "11030.0": {"P": 0.00467}, "12560.0": {"P": 0.004438}, "14290.0": {"P": 0.004205}, "16270.0": {"P": 0.003971}, "18530.0": {"P": 0.00374}, "21090.0": {"P": 0.003513}, "24010.0": {"P": 0.00329}, "27340.0": {"P": 0.003074}, "31130.0": {"P": 0.002865}, "35430.0": {"P": 0.002664}, "40340.0": {"P": 0.002472}, "45930.0": {"P": 0.002288}, "52290.0": {"P": 0.002114}, "59530.0": {"P": 0.00195}, "67770.0": {"P": 0.001795}, "77150.0": {"P": 0.00165}, "87840.0": {"P": 0.001513}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.4883, "q": 0.0174, "mu": 1.563, "epsilonL": 0.0001938, "Eth": 173.9}, "E_min": 173.9, "E_max": 100000}}]}