Return to search

Plasma-Surface Interaction Data Set 355

Sputtering of T+ on Ru(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Ru(pc) at 300 K

angle = 0.0 deg E /eV P
68.690.0
79.699.345e-05
92.470.0003972
107.30.001022
124.50.002114
144.40.003821
167.60.006233
194.40.009309
225.60.01285
261.70.01654
303.70.02007
352.30.0232
408.80.02585
474.30.02802
550.30.02974
638.50.03111
740.80.03217
859.60.03298
997.30.03357
1157.00.03398
1343.00.03422
1558.00.0343
1807.00.03424
2097.00.03402
2433.00.03366
2823.00.03317
3275.00.03254
3800.00.03178
4409.00.0309
5116.00.02992
5936.00.02884
6887.00.02767
7991.00.02644
9271.00.02515
10760.00.02382
12480.00.02247
14480.00.02111
16800.00.01975
19490.00.01842
22620.00.01711
26240.00.01584
30450.00.01462
35330.00.01345
40990.00.01234
47560.00.01129
55180.00.0103
64020.00.009379
74280.00.008518
86190.00.007719

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 68.69 – 100000