{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ru", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"68.69": {"P": 0}, "79.69": {"P": 9.345e-05}, "92.47": {"P": 0.0003972}, "107.3": {"P": 0.001022}, "124.5": {"P": 0.002114}, "144.4": {"P": 0.003821}, "167.6": {"P": 0.006233}, "194.4": {"P": 0.009309}, "225.6": {"P": 0.01285}, "261.7": {"P": 0.01654}, "303.7": {"P": 0.02007}, "352.3": {"P": 0.0232}, "408.8": {"P": 0.02585}, "474.3": {"P": 0.02802}, "550.3": {"P": 0.02974}, "638.5": {"P": 0.03111}, "740.8": {"P": 0.03217}, "859.6": {"P": 0.03298}, "997.3": {"P": 0.03357}, "1157.0": {"P": 0.03398}, "1343.0": {"P": 0.03422}, "1558.0": {"P": 0.0343}, "1807.0": {"P": 0.03424}, "2097.0": {"P": 0.03402}, "2433.0": {"P": 0.03366}, "2823.0": {"P": 0.03317}, "3275.0": {"P": 0.03254}, "3800.0": {"P": 0.03178}, "4409.0": {"P": 0.0309}, "5116.0": {"P": 0.02992}, "5936.0": {"P": 0.02884}, "6887.0": {"P": 0.02767}, "7991.0": {"P": 0.02644}, "9271.0": {"P": 0.02515}, "10760.0": {"P": 0.02382}, "12480.0": {"P": 0.02247}, "14480.0": {"P": 0.02111}, "16800.0": {"P": 0.01975}, "19490.0": {"P": 0.01842}, "22620.0": {"P": 0.01711}, "26240.0": {"P": 0.01584}, "30450.0": {"P": 0.01462}, "35330.0": {"P": 0.01345}, "40990.0": {"P": 0.01234}, "47560.0": {"P": 0.01129}, "55180.0": {"P": 0.0103}, "64020.0": {"P": 0.009379}, "74280.0": {"P": 0.008518}, "86190.0": {"P": 0.007719}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3922, "q": 0.0882, "mu": 1.706, "epsilonL": 0.0001957, "Eth": 68.69}, "E_min": 68.69, "E_max": 100000}}]}