{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ru", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of T+ on Ru(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3922, "q": 0.0882, "mu": 1.706, "epsilonL": 0.0001957, "Eth": 68.69}, "E_min": 68.69, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
68.69	0.0	
79.69	9.345e-05	
92.47	0.0003972	
107.3	0.001022	
124.5	0.002114	
144.4	0.003821	
167.6	0.006233	
194.4	0.009309	
225.6	0.01285	
261.7	0.01654	
303.7	0.02007	
352.3	0.0232	
408.8	0.02585	
474.3	0.02802	
550.3	0.02974	
638.5	0.03111	
740.8	0.03217	
859.6	0.03298	
997.3	0.03357	
1157.0	0.03398	
1343.0	0.03422	
1558.0	0.0343	
1807.0	0.03424	
2097.0	0.03402	
2433.0	0.03366	
2823.0	0.03317	
3275.0	0.03254	
3800.0	0.03178	
4409.0	0.0309	
5116.0	0.02992	
5936.0	0.02884	
6887.0	0.02767	
7991.0	0.02644	
9271.0	0.02515	
10760.0	0.02382	
12480.0	0.02247	
14480.0	0.02111	
16800.0	0.01975	
19490.0	0.01842	
22620.0	0.01711	
26240.0	0.01584	
30450.0	0.01462	
35330.0	0.01345	
40990.0	0.01234	
47560.0	0.01129	
55180.0	0.0103	
64020.0	0.009379	
74280.0	0.008518	
86190.0	0.007719	
-----