pwiDB

Plasma-Surface Interaction Data Set 349

Sputtering of Ar⁺ on Mo(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Mo(pc) at 300 K

angle = 0.0 deg	E /eV	P
	28.21	0.0
	33.34	0.0002407
	39.39	0.001301
	46.54	0.003998
	54.98	0.009696
	64.96	0.02048
	76.76	0.03916
	90.69	0.06887
	107.2	0.112
	126.6	0.1689
	149.6	0.2372
	176.7	0.3123
	208.8	0.3899
	246.7	0.4666
	291.5	0.5411
	344.4	0.6134
	406.9	0.6842
	480.8	0.7543
	568.0	0.8246
	671.2	0.8958
	793.0	0.9683
	936.9	1.042
	1107.0	1.118
	1308.0	1.196
	1545.0	1.275
	1826.0	1.356
	2157.0	1.438
	2549.0	1.521
	3011.0	1.604
	3558.0	1.687
	4204.0	1.77
	4967.0	1.851
	5869.0	1.931
	6934.0	2.008
	8192.0	2.082
	9679.0	2.153
	11440.0	2.219
	13510.0	2.279
	15960.0	2.334
	18860.0	2.381
	22290.0	2.421
	26330.0	2.452
	31110.0	2.474
	36760.0	2.486
	43430.0	2.487
	51310.0	2.476
	60630.0	2.454
	71630.0	2.42
	84640.0	2.375

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1339
q = 6.361
mu = 1.956
epsilonL = 6.98e-06
Eth = 28.21

Fit range

E = 28.21 – 100000