{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mo", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"28.21": {"P": 0}, "33.34": {"P": 0.0002407}, "39.39": {"P": 0.001301}, "46.54": {"P": 0.003998}, "54.98": {"P": 0.009696}, "64.96": {"P": 0.02048}, "76.76": {"P": 0.03916}, "90.69": {"P": 0.06887}, "107.2": {"P": 0.112}, "126.6": {"P": 0.1689}, "149.6": {"P": 0.2372}, "176.7": {"P": 0.3123}, "208.8": {"P": 0.3899}, "246.7": {"P": 0.4666}, "291.5": {"P": 0.5411}, "344.4": {"P": 0.6134}, "406.9": {"P": 0.6842}, "480.8": {"P": 0.7543}, "568.0": {"P": 0.8246}, "671.2": {"P": 0.8958}, "793.0": {"P": 0.9683}, "936.9": {"P": 1.042}, "1107.0": {"P": 1.118}, "1308.0": {"P": 1.196}, "1545.0": {"P": 1.275}, "1826.0": {"P": 1.356}, "2157.0": {"P": 1.438}, "2549.0": {"P": 1.521}, "3011.0": {"P": 1.604}, "3558.0": {"P": 1.687}, "4204.0": {"P": 1.77}, "4967.0": {"P": 1.851}, "5869.0": {"P": 1.931}, "6934.0": {"P": 2.008}, "8192.0": {"P": 2.082}, "9679.0": {"P": 2.153}, "11440.0": {"P": 2.219}, "13510.0": {"P": 2.279}, "15960.0": {"P": 2.334}, "18860.0": {"P": 2.381}, "22290.0": {"P": 2.421}, "26330.0": {"P": 2.452}, "31110.0": {"P": 2.474}, "36760.0": {"P": 2.486}, "43430.0": {"P": 2.487}, "51310.0": {"P": 2.476}, "60630.0": {"P": 2.454}, "71630.0": {"P": 2.42}, "84640.0": {"P": 2.375}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1339, "q": 6.361, "mu": 1.956, "epsilonL": 6.98e-06, "Eth": 28.21}, "E_min": 28.21, "E_max": 100000}}]}