{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mo", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Ar+ on Mo(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1339, "q": 6.361, "mu": 1.956, "epsilonL": 6.98e-06, "Eth": 28.21}, "E_min": 28.21, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
28.21	0.0	
33.34	0.0002407	
39.39	0.001301	
46.54	0.003998	
54.98	0.009696	
64.96	0.02048	
76.76	0.03916	
90.69	0.06887	
107.2	0.112	
126.6	0.1689	
149.6	0.2372	
176.7	0.3123	
208.8	0.3899	
246.7	0.4666	
291.5	0.5411	
344.4	0.6134	
406.9	0.6842	
480.8	0.7543	
568.0	0.8246	
671.2	0.8958	
793.0	0.9683	
936.9	1.042	
1107.0	1.118	
1308.0	1.196	
1545.0	1.275	
1826.0	1.356	
2157.0	1.438	
2549.0	1.521	
3011.0	1.604	
3558.0	1.687	
4204.0	1.77	
4967.0	1.851	
5869.0	1.931	
6934.0	2.008	
8192.0	2.082	
9679.0	2.153	
11440.0	2.219	
13510.0	2.279	
15960.0	2.334	
18860.0	2.381	
22290.0	2.421	
26330.0	2.452	
31110.0	2.474	
36760.0	2.486	
43430.0	2.487	
51310.0	2.476	
60630.0	2.454	
71630.0	2.42	
84640.0	2.375	
-----