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Plasma-Surface Interaction Data Set 334

Sputtering of 3He+ on Nb(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Nb(pc) at 300 K

angle = 0.0 deg E /eV P
79.820.0
92.330.0002182
106.80.0006044
123.50.001194
142.90.002046
165.30.003225
191.20.004795
221.10.006809
255.80.009289
295.90.01222
342.20.01552
395.90.01909
457.90.02278
529.70.02644
612.70.02993
708.70.03315
819.70.03605
948.20.03859
1097.00.04078
1269.00.04261
1467.00.04412
1697.00.04533
1963.00.04625
2271.00.04691
2627.00.04732
3039.00.0475
3515.00.04745
4065.00.04719
4702.00.04672
5439.00.04605
6292.00.04519
7278.00.04416
8418.00.04296
9737.00.04161
11260.00.04012
13030.00.03853
15070.00.03684
17430.00.03507
20160.00.03326
23320.00.03141
26980.00.02955
31200.00.0277
36090.00.02587
41750.00.02407
48290.00.02233
55860.00.02065
64610.00.01904
74740.00.01751
86450.00.01605

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 79.82 – 100000