{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Nb", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"79.82": {"P": 0}, "92.33": {"P": 0.0002182}, "106.8": {"P": 0.0006044}, "123.5": {"P": 0.001194}, "142.9": {"P": 0.002046}, "165.3": {"P": 0.003225}, "191.2": {"P": 0.004795}, "221.1": {"P": 0.006809}, "255.8": {"P": 0.009289}, "295.9": {"P": 0.01222}, "342.2": {"P": 0.01552}, "395.9": {"P": 0.01909}, "457.9": {"P": 0.02278}, "529.7": {"P": 0.02644}, "612.7": {"P": 0.02993}, "708.7": {"P": 0.03315}, "819.7": {"P": 0.03605}, "948.2": {"P": 0.03859}, "1097.0": {"P": 0.04078}, "1269.0": {"P": 0.04261}, "1467.0": {"P": 0.04412}, "1697.0": {"P": 0.04533}, "1963.0": {"P": 0.04625}, "2271.0": {"P": 0.04691}, "2627.0": {"P": 0.04732}, "3039.0": {"P": 0.0475}, "3515.0": {"P": 0.04745}, "4065.0": {"P": 0.04719}, "4702.0": {"P": 0.04672}, "5439.0": {"P": 0.04605}, "6292.0": {"P": 0.04519}, "7278.0": {"P": 0.04416}, "8418.0": {"P": 0.04296}, "9737.0": {"P": 0.04161}, "11260.0": {"P": 0.04012}, "13030.0": {"P": 0.03853}, "15070.0": {"P": 0.03684}, "17430.0": {"P": 0.03507}, "20160.0": {"P": 0.03326}, "23320.0": {"P": 0.03141}, "26980.0": {"P": 0.02955}, "31200.0": {"P": 0.0277}, "36090.0": {"P": 0.02587}, "41750.0": {"P": 0.02407}, "48290.0": {"P": 0.02233}, "55860.0": {"P": 0.02065}, "64610.0": {"P": 0.01904}, "74740.0": {"P": 0.01751}, "86450.0": {"P": 0.01605}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3872, "q": 0.1233, "mu": 1.157, "epsilonL": 0.0001047, "Eth": 79.82}, "E_min": 79.82, "E_max": 100000}}]}