{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Nb", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of (3He)+ on Nb(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3872, "q": 0.1233, "mu": 1.157, "epsilonL": 0.0001047, "Eth": 79.82}, "E_min": 79.82, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
79.82	0.0	
92.33	0.0002182	
106.8	0.0006044	
123.5	0.001194	
142.9	0.002046	
165.3	0.003225	
191.2	0.004795	
221.1	0.006809	
255.8	0.009289	
295.9	0.01222	
342.2	0.01552	
395.9	0.01909	
457.9	0.02278	
529.7	0.02644	
612.7	0.02993	
708.7	0.03315	
819.7	0.03605	
948.2	0.03859	
1097.0	0.04078	
1269.0	0.04261	
1467.0	0.04412	
1697.0	0.04533	
1963.0	0.04625	
2271.0	0.04691	
2627.0	0.04732	
3039.0	0.0475	
3515.0	0.04745	
4065.0	0.04719	
4702.0	0.04672	
5439.0	0.04605	
6292.0	0.04519	
7278.0	0.04416	
8418.0	0.04296	
9737.0	0.04161	
11260.0	0.04012	
13030.0	0.03853	
15070.0	0.03684	
17430.0	0.03507	
20160.0	0.03326	
23320.0	0.03141	
26980.0	0.02955	
31200.0	0.0277	
36090.0	0.02587	
41750.0	0.02407	
48290.0	0.02233	
55860.0	0.02065	
64610.0	0.01904	
74740.0	0.01751	
86450.0	0.01605	
-----