pwiDB

Plasma-Surface Interaction Data Set 329

Sputtering of Zr⁺ on Zr(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Zr⁺ on Zr(pc) at 300 K

angle = 0.0 deg	E /eV	P
	29.92	1.153e-33
	35.31	6.77e-05
	41.67	0.0003575
	49.17	0.001087
	58.03	0.00264
	68.48	0.005653
	80.81	0.01115
	95.37	0.02068
	112.5	0.0364
	132.8	0.061
	156.7	0.09725
	185.0	0.1472
	218.3	0.2112
	257.6	0.2874
	304.0	0.3723
	358.7	0.4621
	423.3	0.5538
	499.6	0.6457
	589.5	0.7376
	695.7	0.8297
	821.0	0.9228
	968.9	1.018
	1143.0	1.116
	1349.0	1.217
	1592.0	1.322
	1879.0	1.431
	2218.0	1.544
	2617.0	1.662
	3088.0	1.783
	3644.0	1.909
	4301.0	2.039
	5075.0	2.172
	5989.0	2.308
	7068.0	2.446
	8341.0	2.586
	9843.0	2.727
	11620.0	2.868
	13710.0	3.008
	16180.0	3.146
	19090.0	3.282
	22530.0	3.413
	26590.0	3.54
	31370.0	3.66
	37020.0	3.773
	43690.0	3.878
	51560.0	3.972
	60850.0	4.055
	71810.0	4.124
	84740.0	4.18

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2699
q = 10.86
mu = 1.925
epsilonL = 2.102e-06
Eth = 29.92

Fit range

E = 29.92 – 100000