{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Zr", "surface_phase": "pc", "species": {"text": "Zr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"29.92": {"P": 1.153e-33}, "35.31": {"P": 6.77e-05}, "41.67": {"P": 0.0003575}, "49.17": {"P": 0.001087}, "58.03": {"P": 0.00264}, "68.48": {"P": 0.005653}, "80.81": {"P": 0.01115}, "95.37": {"P": 0.02068}, "112.5": {"P": 0.0364}, "132.8": {"P": 0.061}, "156.7": {"P": 0.09725}, "185.0": {"P": 0.1472}, "218.3": {"P": 0.2112}, "257.6": {"P": 0.2874}, "304.0": {"P": 0.3723}, "358.7": {"P": 0.4621}, "423.3": {"P": 0.5538}, "499.6": {"P": 0.6457}, "589.5": {"P": 0.7376}, "695.7": {"P": 0.8297}, "821.0": {"P": 0.9228}, "968.9": {"P": 1.018}, "1143.0": {"P": 1.116}, "1349.0": {"P": 1.217}, "1592.0": {"P": 1.322}, "1879.0": {"P": 1.431}, "2218.0": {"P": 1.544}, "2617.0": {"P": 1.662}, "3088.0": {"P": 1.783}, "3644.0": {"P": 1.909}, "4301.0": {"P": 2.039}, "5075.0": {"P": 2.172}, "5989.0": {"P": 2.308}, "7068.0": {"P": 2.446}, "8341.0": {"P": 2.586}, "9843.0": {"P": 2.727}, "11620.0": {"P": 2.868}, "13710.0": {"P": 3.008}, "16180.0": {"P": 3.146}, "19090.0": {"P": 3.282}, "22530.0": {"P": 3.413}, "26590.0": {"P": 3.54}, "31370.0": {"P": 3.66}, "37020.0": {"P": 3.773}, "43690.0": {"P": 3.878}, "51560.0": {"P": 3.972}, "60850.0": {"P": 4.055}, "71810.0": {"P": 4.124}, "84740.0": {"P": 4.18}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2699, "q": 10.86, "mu": 1.925, "epsilonL": 2.102e-06, "Eth": 29.92}, "E_min": 29.92, "E_max": 100000}}]}