{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Zr", "surface_phase": "pc", "species": {"text": "Zr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Zr+ on Zr(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2699, "q": 10.86, "mu": 1.925, "epsilonL": 2.102e-06, "Eth": 29.92}, "E_min": 29.92, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
29.92	1.153e-33	
35.31	6.77e-05	
41.67	0.0003575	
49.17	0.001087	
58.03	0.00264	
68.48	0.005653	
80.81	0.01115	
95.37	0.02068	
112.5	0.0364	
132.8	0.061	
156.7	0.09725	
185.0	0.1472	
218.3	0.2112	
257.6	0.2874	
304.0	0.3723	
358.7	0.4621	
423.3	0.5538	
499.6	0.6457	
589.5	0.7376	
695.7	0.8297	
821.0	0.9228	
968.9	1.018	
1143.0	1.116	
1349.0	1.217	
1592.0	1.322	
1879.0	1.431	
2218.0	1.544	
2617.0	1.662	
3088.0	1.783	
3644.0	1.909	
4301.0	2.039	
5075.0	2.172	
5989.0	2.308	
7068.0	2.446	
8341.0	2.586	
9843.0	2.727	
11620.0	2.868	
13710.0	3.008	
16180.0	3.146	
19090.0	3.282	
22530.0	3.413	
26590.0	3.54	
31370.0	3.66	
37020.0	3.773	
43690.0	3.878	
51560.0	3.972	
60850.0	4.055	
71810.0	4.124	
84740.0	4.18	
-----