pwiDB

Plasma-Surface Interaction Data Set 327

Sputtering of Ar⁺ on Zr(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Zr(pc) at 300 K

angle = 0.0 deg	E /eV	P
	24.03	0.0
	28.48	0.000133
	33.76	0.0007632
	40.02	0.002445
	47.44	0.006142
	56.23	0.0134
	66.66	0.02643
	79.02	0.04786
	93.67	0.07997
	111.0	0.1235
	131.6	0.1766
	156.0	0.2357
	184.9	0.2969
	219.2	0.3574
	259.9	0.416
	308.1	0.4727
	365.2	0.5282
	432.9	0.5834
	513.1	0.6388
	608.3	0.695
	721.0	0.7526
	854.7	0.8116
	1013.0	0.8722
	1201.0	0.9344
	1424.0	0.998
	1688.0	1.063
	2000.0	1.129
	2371.0	1.196
	2811.0	1.263
	3332.0	1.33
	3950.0	1.397
	4682.0	1.463
	5550.0	1.528
	6579.0	1.59
	7799.0	1.651
	9245.0	1.708
	10960.0	1.761
	12990.0	1.81
	15400.0	1.854
	18250.0	1.892
	21640.0	1.924
	25650.0	1.948
	30410.0	1.965
	36040.0	1.973
	42720.0	1.972
	50650.0	1.962
	60040.0	1.943
	71170.0	1.913
	84360.0	1.874

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1601
q = 5.047
mu = 2.022
epsilonL = 7.294e-06
Eth = 24.03

Fit range

E = 24.03 – 100000