{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Zr", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"24.03": {"P": 0}, "28.48": {"P": 0.000133}, "33.76": {"P": 0.0007632}, "40.02": {"P": 0.002445}, "47.44": {"P": 0.006142}, "56.23": {"P": 0.0134}, "66.66": {"P": 0.02643}, "79.02": {"P": 0.04786}, "93.67": {"P": 0.07997}, "111.0": {"P": 0.1235}, "131.6": {"P": 0.1766}, "156.0": {"P": 0.2357}, "184.9": {"P": 0.2969}, "219.2": {"P": 0.3574}, "259.9": {"P": 0.416}, "308.1": {"P": 0.4727}, "365.2": {"P": 0.5282}, "432.9": {"P": 0.5834}, "513.1": {"P": 0.6388}, "608.3": {"P": 0.695}, "721.0": {"P": 0.7526}, "854.7": {"P": 0.8116}, "1013.0": {"P": 0.8722}, "1201.0": {"P": 0.9344}, "1424.0": {"P": 0.998}, "1688.0": {"P": 1.063}, "2000.0": {"P": 1.129}, "2371.0": {"P": 1.196}, "2811.0": {"P": 1.263}, "3332.0": {"P": 1.33}, "3950.0": {"P": 1.397}, "4682.0": {"P": 1.463}, "5550.0": {"P": 1.528}, "6579.0": {"P": 1.59}, "7799.0": {"P": 1.651}, "9245.0": {"P": 1.708}, "10960.0": {"P": 1.761}, "12990.0": {"P": 1.81}, "15400.0": {"P": 1.854}, "18250.0": {"P": 1.892}, "21640.0": {"P": 1.924}, "25650.0": {"P": 1.948}, "30410.0": {"P": 1.965}, "36040.0": {"P": 1.973}, "42720.0": {"P": 1.972}, "50650.0": {"P": 1.962}, "60040.0": {"P": 1.943}, "71170.0": {"P": 1.913}, "84360.0": {"P": 1.874}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1601, "q": 5.047, "mu": 2.022, "epsilonL": 7.294e-06, "Eth": 24.03}, "E_min": 24.03, "E_max": 100000}}]}