{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Zr", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Zr(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1601, "q": 5.047, "mu": 2.022, "epsilonL": 7.294e-06, "Eth": 24.03}, "E_min": 24.03, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
24.03	0.0	
28.48	0.000133	
33.76	0.0007632	
40.02	0.002445	
47.44	0.006142	
56.23	0.0134	
66.66	0.02643	
79.02	0.04786	
93.67	0.07997	
111.0	0.1235	
131.6	0.1766	
156.0	0.2357	
184.9	0.2969	
219.2	0.3574	
259.9	0.416	
308.1	0.4727	
365.2	0.5282	
432.9	0.5834	
513.1	0.6388	
608.3	0.695	
721.0	0.7526	
854.7	0.8116	
1013.0	0.8722	
1201.0	0.9344	
1424.0	0.998	
1688.0	1.063	
2000.0	1.129	
2371.0	1.196	
2811.0	1.263	
3332.0	1.33	
3950.0	1.397	
4682.0	1.463	
5550.0	1.528	
6579.0	1.59	
7799.0	1.651	
9245.0	1.708	
10960.0	1.761	
12990.0	1.81	
15400.0	1.854	
18250.0	1.892	
21640.0	1.924	
25650.0	1.948	
30410.0	1.965	
36040.0	1.973	
42720.0	1.972	
50650.0	1.962	
60040.0	1.943	
71170.0	1.913	
84360.0	1.874	
-----