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Plasma-Surface Interaction Data Set 321

Sputtering of H+ on Zr(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Zr(pc) at 300 K

angle = 0.0 deg E /eV P
182.72.902e-20
207.87.909e-05
236.40.0001909
268.80.0003381
305.80.0005236
347.70.000748
395.50.001009
449.80.001299
511.60.001609
581.80.001927
661.70.002239
752.60.002534
855.90.002802
973.40.003037
1107.00.003235
1259.00.003396
1432.00.00352
1629.00.00361
1852.00.003668
2107.00.003698
2396.00.003701
2725.00.003682
3099.00.003642
3525.00.003585
4009.00.003511
4559.00.003424
5185.00.003325
5897.00.003216
6707.00.003098
7628.00.002974
8675.00.002845
9866.00.002712
11220.00.002577
12760.00.002441
14510.00.002306
16510.00.002171
18770.00.002039
21350.00.00191
24280.00.001784
27620.00.001663
31410.00.001546
35720.00.001435
40630.00.001329
46210.00.001228
52550.00.001133
59770.00.001043
67980.00.0009587
77310.00.0008799
87930.00.0008064

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 182.7 – 100000