{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Zr", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of H+ on Zr(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.4518, "q": 0.0103, "mu": 1.041, "epsilonL": 0.0002261, "Eth": 182.7}, "E_min": 182.7, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
182.7	2.902e-20	
207.8	7.909e-05	
236.4	0.0001909	
268.8	0.0003381	
305.8	0.0005236	
347.7	0.000748	
395.5	0.001009	
449.8	0.001299	
511.6	0.001609	
581.8	0.001927	
661.7	0.002239	
752.6	0.002534	
855.9	0.002802	
973.4	0.003037	
1107.0	0.003235	
1259.0	0.003396	
1432.0	0.00352	
1629.0	0.00361	
1852.0	0.003668	
2107.0	0.003698	
2396.0	0.003701	
2725.0	0.003682	
3099.0	0.003642	
3525.0	0.003585	
4009.0	0.003511	
4559.0	0.003424	
5185.0	0.003325	
5897.0	0.003216	
6707.0	0.003098	
7628.0	0.002974	
8675.0	0.002845	
9866.0	0.002712	
11220.0	0.002577	
12760.0	0.002441	
14510.0	0.002306	
16510.0	0.002171	
18770.0	0.002039	
21350.0	0.00191	
24280.0	0.001784	
27620.0	0.001663	
31410.0	0.001546	
35720.0	0.001435	
40630.0	0.001329	
46210.0	0.001228	
52550.0	0.001133	
59770.0	0.001043	
67980.0	0.0009587	
77310.0	0.0008799	
87930.0	0.0008064	
-----