{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Zr", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"182.7": {"P": 2.902e-20}, "207.8": {"P": 7.909e-05}, "236.4": {"P": 0.0001909}, "268.8": {"P": 0.0003381}, "305.8": {"P": 0.0005236}, "347.7": {"P": 0.000748}, "395.5": {"P": 0.001009}, "449.8": {"P": 0.001299}, "511.6": {"P": 0.001609}, "581.8": {"P": 0.001927}, "661.7": {"P": 0.002239}, "752.6": {"P": 0.002534}, "855.9": {"P": 0.002802}, "973.4": {"P": 0.003037}, "1107.0": {"P": 0.003235}, "1259.0": {"P": 0.003396}, "1432.0": {"P": 0.00352}, "1629.0": {"P": 0.00361}, "1852.0": {"P": 0.003668}, "2107.0": {"P": 0.003698}, "2396.0": {"P": 0.003701}, "2725.0": {"P": 0.003682}, "3099.0": {"P": 0.003642}, "3525.0": {"P": 0.003585}, "4009.0": {"P": 0.003511}, "4559.0": {"P": 0.003424}, "5185.0": {"P": 0.003325}, "5897.0": {"P": 0.003216}, "6707.0": {"P": 0.003098}, "7628.0": {"P": 0.002974}, "8675.0": {"P": 0.002845}, "9866.0": {"P": 0.002712}, "11220.0": {"P": 0.002577}, "12760.0": {"P": 0.002441}, "14510.0": {"P": 0.002306}, "16510.0": {"P": 0.002171}, "18770.0": {"P": 0.002039}, "21350.0": {"P": 0.00191}, "24280.0": {"P": 0.001784}, "27620.0": {"P": 0.001663}, "31410.0": {"P": 0.001546}, "35720.0": {"P": 0.001435}, "40630.0": {"P": 0.001329}, "46210.0": {"P": 0.001228}, "52550.0": {"P": 0.001133}, "59770.0": {"P": 0.001043}, "67980.0": {"P": 0.0009587}, "77310.0": {"P": 0.0008799}, "87930.0": {"P": 0.0008064}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.4518, "q": 0.0103, "mu": 1.041, "epsilonL": 0.0002261, "Eth": 182.7}, "E_min": 182.7, "E_max": 100000}}]}