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Plasma-Surface Interaction Data Set 311

Sputtering of D+ on Ge(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Ge(pc) at 300 K

angle = 0.0 deg E /eV P
44.660.0
52.270.0002013
61.180.0006789
71.610.001497
83.820.002727
98.110.004395
114.80.006453
134.40.008773
157.30.01117
184.20.01348
215.60.01557
252.30.01739
295.30.01891
345.70.02016
404.60.02117
473.60.02197
554.40.02259
648.90.02305
759.50.02338
889.00.02357
1041.00.02363
1218.00.02358
1426.00.02342
1669.00.02314
1953.00.02275
2286.00.02226
2676.00.02167
3132.00.02099
3666.00.02024
4291.00.01941
5023.00.01852
5880.00.01759
6882.00.01662
8055.00.01564
9429.00.01464
11040.00.01365
12920.00.01268
15120.00.01172
17700.00.0108
20720.00.009914
24250.00.00907
28380.00.008271
33220.00.007519
38880.00.006817
45510.00.006163
53270.00.005559
62360.00.005002
72990.00.004491
85430.00.004023

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 44.66 – 100000