{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ge", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Ge(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2327, "q": 0.0609, "mu": 1.41, "epsilonL": 0.0002972, "Eth": 44.66}, "E_min": 44.66, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
44.66	0.0	
52.27	0.0002013	
61.18	0.0006789	
71.61	0.001497	
83.82	0.002727	
98.11	0.004395	
114.8	0.006453	
134.4	0.008773	
157.3	0.01117	
184.2	0.01348	
215.6	0.01557	
252.3	0.01739	
295.3	0.01891	
345.7	0.02016	
404.6	0.02117	
473.6	0.02197	
554.4	0.02259	
648.9	0.02305	
759.5	0.02338	
889.0	0.02357	
1041.0	0.02363	
1218.0	0.02358	
1426.0	0.02342	
1669.0	0.02314	
1953.0	0.02275	
2286.0	0.02226	
2676.0	0.02167	
3132.0	0.02099	
3666.0	0.02024	
4291.0	0.01941	
5023.0	0.01852	
5880.0	0.01759	
6882.0	0.01662	
8055.0	0.01564	
9429.0	0.01464	
11040.0	0.01365	
12920.0	0.01268	
15120.0	0.01172	
17700.0	0.0108	
20720.0	0.009914	
24250.0	0.00907	
28380.0	0.008271	
33220.0	0.007519	
38880.0	0.006817	
45510.0	0.006163	
53270.0	0.005559	
62360.0	0.005002	
72990.0	0.004491	
85430.0	0.004023	
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