{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ge", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"44.66": {"P": 0}, "52.27": {"P": 0.0002013}, "61.18": {"P": 0.0006789}, "71.61": {"P": 0.001497}, "83.82": {"P": 0.002727}, "98.11": {"P": 0.004395}, "114.8": {"P": 0.006453}, "134.4": {"P": 0.008773}, "157.3": {"P": 0.01117}, "184.2": {"P": 0.01348}, "215.6": {"P": 0.01557}, "252.3": {"P": 0.01739}, "295.3": {"P": 0.01891}, "345.7": {"P": 0.02016}, "404.6": {"P": 0.02117}, "473.6": {"P": 0.02197}, "554.4": {"P": 0.02259}, "648.9": {"P": 0.02305}, "759.5": {"P": 0.02338}, "889.0": {"P": 0.02357}, "1041.0": {"P": 0.02363}, "1218.0": {"P": 0.02358}, "1426.0": {"P": 0.02342}, "1669.0": {"P": 0.02314}, "1953.0": {"P": 0.02275}, "2286.0": {"P": 0.02226}, "2676.0": {"P": 0.02167}, "3132.0": {"P": 0.02099}, "3666.0": {"P": 0.02024}, "4291.0": {"P": 0.01941}, "5023.0": {"P": 0.01852}, "5880.0": {"P": 0.01759}, "6882.0": {"P": 0.01662}, "8055.0": {"P": 0.01564}, "9429.0": {"P": 0.01464}, "11040.0": {"P": 0.01365}, "12920.0": {"P": 0.01268}, "15120.0": {"P": 0.01172}, "17700.0": {"P": 0.0108}, "20720.0": {"P": 0.009914}, "24250.0": {"P": 0.00907}, "28380.0": {"P": 0.008271}, "33220.0": {"P": 0.007519}, "38880.0": {"P": 0.006817}, "45510.0": {"P": 0.006163}, "53270.0": {"P": 0.005559}, "62360.0": {"P": 0.005002}, "72990.0": {"P": 0.004491}, "85430.0": {"P": 0.004023}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2327, "q": 0.0609, "mu": 1.41, "epsilonL": 0.0002972, "Eth": 44.66}, "E_min": 44.66, "E_max": 100000}}]}