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Plasma-Surface Interaction Data Set 307

Sputtering of D+ on Ga(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Ga(pc) at 300 K

angle = 0.0 deg E /eV P
29.560.0
34.890.000154
41.190.0007037
48.620.001893
57.390.004002
67.740.00721
79.960.01143
94.380.01626
111.40.02113
131.50.02557
155.20.02935
183.20.03246
216.30.03497
255.30.037
301.40.03866
355.70.04001
419.90.04111
495.60.04199
585.00.04266
690.60.04313
815.10.0434
962.20.04346
1136.00.04332
1341.00.04298
1582.00.04242
1868.00.04166
2205.00.04069
2603.00.03954
3072.00.03821
3626.00.03672
4281.00.0351
5053.00.03336
5964.00.03154
7040.00.02967
8310.00.02776
9809.00.02585
11580.00.02395
13670.00.02209
16130.00.02029
19040.00.01856
22480.00.01692
26530.00.01536
31320.00.0139
36970.00.01254
43640.00.01128
51510.00.01011
60800.00.009048
71770.00.008075
84720.00.00719

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 29.56 – 100000