{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ga", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of D+ on Ga(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2292, "q": 0.1113, "mu": 1.767, "epsilonL": 0.0003094, "Eth": 29.56}, "E_min": 29.56, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
29.56	0.0	
34.89	0.000154	
41.19	0.0007037	
48.62	0.001893	
57.39	0.004002	
67.74	0.00721	
79.96	0.01143	
94.38	0.01626	
111.4	0.02113	
131.5	0.02557	
155.2	0.02935	
183.2	0.03246	
216.3	0.03497	
255.3	0.037	
301.4	0.03866	
355.7	0.04001	
419.9	0.04111	
495.6	0.04199	
585.0	0.04266	
690.6	0.04313	
815.1	0.0434	
962.2	0.04346	
1136.0	0.04332	
1341.0	0.04298	
1582.0	0.04242	
1868.0	0.04166	
2205.0	0.04069	
2603.0	0.03954	
3072.0	0.03821	
3626.0	0.03672	
4281.0	0.0351	
5053.0	0.03336	
5964.0	0.03154	
7040.0	0.02967	
8310.0	0.02776	
9809.0	0.02585	
11580.0	0.02395	
13670.0	0.02209	
16130.0	0.02029	
19040.0	0.01856	
22480.0	0.01692	
26530.0	0.01536	
31320.0	0.0139	
36970.0	0.01254	
43640.0	0.01128	
51510.0	0.01011	
60800.0	0.009048	
71770.0	0.008075	
84720.0	0.00719	
-----