{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ga", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"29.56": {"P": 0}, "34.89": {"P": 0.000154}, "41.19": {"P": 0.0007037}, "48.62": {"P": 0.001893}, "57.39": {"P": 0.004002}, "67.74": {"P": 0.00721}, "79.96": {"P": 0.01143}, "94.38": {"P": 0.01626}, "111.4": {"P": 0.02113}, "131.5": {"P": 0.02557}, "155.2": {"P": 0.02935}, "183.2": {"P": 0.03246}, "216.3": {"P": 0.03497}, "255.3": {"P": 0.037}, "301.4": {"P": 0.03866}, "355.7": {"P": 0.04001}, "419.9": {"P": 0.04111}, "495.6": {"P": 0.04199}, "585.0": {"P": 0.04266}, "690.6": {"P": 0.04313}, "815.1": {"P": 0.0434}, "962.2": {"P": 0.04346}, "1136.0": {"P": 0.04332}, "1341.0": {"P": 0.04298}, "1582.0": {"P": 0.04242}, "1868.0": {"P": 0.04166}, "2205.0": {"P": 0.04069}, "2603.0": {"P": 0.03954}, "3072.0": {"P": 0.03821}, "3626.0": {"P": 0.03672}, "4281.0": {"P": 0.0351}, "5053.0": {"P": 0.03336}, "5964.0": {"P": 0.03154}, "7040.0": {"P": 0.02967}, "8310.0": {"P": 0.02776}, "9809.0": {"P": 0.02585}, "11580.0": {"P": 0.02395}, "13670.0": {"P": 0.02209}, "16130.0": {"P": 0.02029}, "19040.0": {"P": 0.01856}, "22480.0": {"P": 0.01692}, "26530.0": {"P": 0.01536}, "31320.0": {"P": 0.0139}, "36970.0": {"P": 0.01254}, "43640.0": {"P": 0.01128}, "51510.0": {"P": 0.01011}, "60800.0": {"P": 0.009048}, "71770.0": {"P": 0.008075}, "84720.0": {"P": 0.00719}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2292, "q": 0.1113, "mu": 1.767, "epsilonL": 0.0003094, "Eth": 29.56}, "E_min": 29.56, "E_max": 100000}}]}