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Plasma-Surface Interaction Data Set 301

Sputtering of Cu+ on Cu(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Cu+ on Cu(pc) at 300 K

angle = 0.0 deg E /eV P
10.780.0
12.993.443e-06
15.653.134e-05
18.860.0001377
22.720.0004504
27.380.001256
32.990.003169
39.750.007448
47.890.01654
57.710.03489
69.540.06959
83.790.1298
101.00.2231
121.70.3493
146.60.4977
176.60.653
212.80.8045
256.40.949
309.01.088
372.31.226
448.61.365
540.61.509
651.41.658
784.91.815
945.81.979
1140.02.151
1373.02.331
1655.02.518
1994.02.712
2402.02.912
2895.03.117
3488.03.326
4203.03.537
5064.03.749
6102.03.961
7353.04.17
8859.04.375
10680.04.574
12860.04.764
15500.04.944
18680.05.11
22500.05.26
27120.05.392
32670.05.503
39370.05.59
47440.05.652
57160.05.684
68880.05.686
82990.05.656

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 10.78 – 100000