{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cu", "surface_phase": "pc", "species": {"text": "Cu+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"10.78": {"P": 0}, "12.99": {"P": 3.443e-06}, "15.65": {"P": 3.134e-05}, "18.86": {"P": 0.0001377}, "22.72": {"P": 0.0004504}, "27.38": {"P": 0.001256}, "32.99": {"P": 0.003169}, "39.75": {"P": 0.007448}, "47.89": {"P": 0.01654}, "57.71": {"P": 0.03489}, "69.54": {"P": 0.06959}, "83.79": {"P": 0.1298}, "101.0": {"P": 0.2231}, "121.7": {"P": 0.3493}, "146.6": {"P": 0.4977}, "176.6": {"P": 0.653}, "212.8": {"P": 0.8045}, "256.4": {"P": 0.949}, "309.0": {"P": 1.088}, "372.3": {"P": 1.226}, "448.6": {"P": 1.365}, "540.6": {"P": 1.509}, "651.4": {"P": 1.658}, "784.9": {"P": 1.815}, "945.8": {"P": 1.979}, "1140.0": {"P": 2.151}, "1373.0": {"P": 2.331}, "1655.0": {"P": 2.518}, "1994.0": {"P": 2.712}, "2402.0": {"P": 2.912}, "2895.0": {"P": 3.117}, "3488.0": {"P": 3.326}, "4203.0": {"P": 3.537}, "5064.0": {"P": 3.749}, "6102.0": {"P": 3.961}, "7353.0": {"P": 4.17}, "8859.0": {"P": 4.375}, "10680.0": {"P": 4.574}, "12860.0": {"P": 4.764}, "15500.0": {"P": 4.944}, "18680.0": {"P": 5.11}, "22500.0": {"P": 5.26}, "27120.0": {"P": 5.392}, "32670.0": {"P": 5.503}, "39370.0": {"P": 5.59}, "47440.0": {"P": 5.652}, "57160.0": {"P": 5.684}, "68880.0": {"P": 5.686}, "82990.0": {"P": 5.656}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 2.604, "q": 14.55, "mu": 2.558, "epsilonL": 4.452e-06, "Eth": 10.78}, "E_min": 10.78, "E_max": 100000}}]}