{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cu", "surface_phase": "pc", "species": {"text": "Cu+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]} ------------------------------------------------------------------------ Sputtering of Cu+ on Cu(pc) at 300 K {"fit_function": "SPTEEX", "coeffs": {"lambda": 2.604, "q": 14.55, "mu": 2.558, "epsilonL": 4.452e-06, "Eth": 10.78}, "E_min": 10.78, "E_max": 100000} angle = 0.0 deg E /eV P 10.78 0.0 12.99 3.443e-06 15.65 3.134e-05 18.86 0.0001377 22.72 0.0004504 27.38 0.001256 32.99 0.003169 39.75 0.007448 47.89 0.01654 57.71 0.03489 69.54 0.06959 83.79 0.1298 101.0 0.2231 121.7 0.3493 146.6 0.4977 176.6 0.653 212.8 0.8045 256.4 0.949 309.0 1.088 372.3 1.226 448.6 1.365 540.6 1.509 651.4 1.658 784.9 1.815 945.8 1.979 1140.0 2.151 1373.0 2.331 1655.0 2.518 1994.0 2.712 2402.0 2.912 2895.0 3.117 3488.0 3.326 4203.0 3.537 5064.0 3.749 6102.0 3.961 7353.0 4.17 8859.0 4.375 10680.0 4.574 12860.0 4.764 15500.0 4.944 18680.0 5.11 22500.0 5.26 27120.0 5.392 32670.0 5.503 39370.0 5.59 47440.0 5.652 57160.0 5.684 68880.0 5.686 82990.0 5.656 -----