pwiDB

Plasma-Surface Interaction Data Set 298

Sputtering of N⁺ on Cu(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of N⁺ on Cu(pc) at 300 K

angle = 0.0 deg	E /eV	P
	15.66	0.0
	18.72	0.0002645
	22.39	0.001712
	26.77	0.005928
	32.01	0.01568
	38.28	0.03508
	45.78	0.06863
	54.74	0.1187
	65.46	0.1829
	78.27	0.254
	93.6	0.3247
	111.9	0.3904
	133.8	0.4503
	160.0	0.5054
	191.4	0.5573
	228.9	0.6071
	273.7	0.656
	327.3	0.7044
	391.3	0.7528
	468.0	0.8013
	559.6	0.8497
	669.2	0.8979
	800.2	0.9456
	956.9	0.9926
	1144.0	1.038
	1368.0	1.083
	1636.0	1.125
	1957.0	1.165
	2340.0	1.202
	2798.0	1.235
	3346.0	1.265
	4001.0	1.29
	4784.0	1.31
	5721.0	1.324
	6841.0	1.332
	8180.0	1.333
	9782.0	1.328
	11700.0	1.315
	13990.0	1.296
	16730.0	1.269
	20000.0	1.234
	23920.0	1.194
	28600.0	1.147
	34200.0	1.095
	40900.0	1.039
	48910.0	0.9799
	58480.0	0.9182
	69930.0	0.8552
	83630.0	0.792

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1595
q = 3.41
mu = 2.157
epsilonL = 3.628e-05
Eth = 15.66

Fit range

E = 15.66 – 100000