{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cu", "surface_phase": "pc", "species": {"text": "N+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"15.66": {"P": 0}, "18.72": {"P": 0.0002645}, "22.39": {"P": 0.001712}, "26.77": {"P": 0.005928}, "32.01": {"P": 0.01568}, "38.28": {"P": 0.03508}, "45.78": {"P": 0.06863}, "54.74": {"P": 0.1187}, "65.46": {"P": 0.1829}, "78.27": {"P": 0.254}, "93.6": {"P": 0.3247}, "111.9": {"P": 0.3904}, "133.8": {"P": 0.4503}, "160.0": {"P": 0.5054}, "191.4": {"P": 0.5573}, "228.9": {"P": 0.6071}, "273.7": {"P": 0.656}, "327.3": {"P": 0.7044}, "391.3": {"P": 0.7528}, "468.0": {"P": 0.8013}, "559.6": {"P": 0.8497}, "669.2": {"P": 0.8979}, "800.2": {"P": 0.9456}, "956.9": {"P": 0.9926}, "1144.0": {"P": 1.038}, "1368.0": {"P": 1.083}, "1636.0": {"P": 1.125}, "1957.0": {"P": 1.165}, "2340.0": {"P": 1.202}, "2798.0": {"P": 1.235}, "3346.0": {"P": 1.265}, "4001.0": {"P": 1.29}, "4784.0": {"P": 1.31}, "5721.0": {"P": 1.324}, "6841.0": {"P": 1.332}, "8180.0": {"P": 1.333}, "9782.0": {"P": 1.328}, "11700.0": {"P": 1.315}, "13990.0": {"P": 1.296}, "16730.0": {"P": 1.269}, "20000.0": {"P": 1.234}, "23920.0": {"P": 1.194}, "28600.0": {"P": 1.147}, "34200.0": {"P": 1.095}, "40900.0": {"P": 1.039}, "48910.0": {"P": 0.9799}, "58480.0": {"P": 0.9182}, "69930.0": {"P": 0.8552}, "83630.0": {"P": 0.792}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1595, "q": 3.41, "mu": 2.157, "epsilonL": 3.628e-05, "Eth": 15.66}, "E_min": 15.66, "E_max": 100000}}]}