{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cu", "surface_phase": "pc", "species": {"text": "N+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of N+ on Cu(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1595, "q": 3.41, "mu": 2.157, "epsilonL": 3.628e-05, "Eth": 15.66}, "E_min": 15.66, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
15.66	0.0	
18.72	0.0002645	
22.39	0.001712	
26.77	0.005928	
32.01	0.01568	
38.28	0.03508	
45.78	0.06863	
54.74	0.1187	
65.46	0.1829	
78.27	0.254	
93.6	0.3247	
111.9	0.3904	
133.8	0.4503	
160.0	0.5054	
191.4	0.5573	
228.9	0.6071	
273.7	0.656	
327.3	0.7044	
391.3	0.7528	
468.0	0.8013	
559.6	0.8497	
669.2	0.8979	
800.2	0.9456	
956.9	0.9926	
1144.0	1.038	
1368.0	1.083	
1636.0	1.125	
1957.0	1.165	
2340.0	1.202	
2798.0	1.235	
3346.0	1.265	
4001.0	1.29	
4784.0	1.31	
5721.0	1.324	
6841.0	1.332	
8180.0	1.333	
9782.0	1.328	
11700.0	1.315	
13990.0	1.296	
16730.0	1.269	
20000.0	1.234	
23920.0	1.194	
28600.0	1.147	
34200.0	1.095	
40900.0	1.039	
48910.0	0.9799	
58480.0	0.9182	
69930.0	0.8552	
83630.0	0.792	
-----