pwiDB

Plasma-Surface Interaction Data Set 287

Sputtering of O⁺ on Ni(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of O⁺ on Ni(pc) at 300 K

angle = 0.0 deg	E /eV	P
	18.4	7.165e-38
	21.93	0.0001718
	26.13	0.001172
	31.15	0.004201
	37.12	0.01146
	44.24	0.0265
	52.73	0.05391
	62.85	0.09754
	74.91	0.1574
	89.29	0.2279
	106.4	0.3011
	126.8	0.3706
	151.2	0.434
	180.2	0.4914
	214.8	0.5446
	256.0	0.5949
	305.1	0.6436
	363.6	0.6916
	433.4	0.7393
	516.5	0.7869
	615.6	0.8344
	733.8	0.8817
	874.5	0.9287
	1042.0	0.975
	1242.0	1.02
	1481.0	1.064
	1765.0	1.107
	2103.0	1.147
	2507.0	1.184
	2988.0	1.218
	3561.0	1.249
	4245.0	1.276
	5059.0	1.298
	6030.0	1.314
	7187.0	1.325
	8566.0	1.331
	10210.0	1.329
	12170.0	1.321
	14500.0	1.306
	17290.0	1.284
	20600.0	1.254
	24560.0	1.219
	29270.0	1.177
	34880.0	1.13
	41580.0	1.078
	49550.0	1.022
	59060.0	0.9628
	70390.0	0.902
	83900.0	0.8402

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2107
q = 3.403
mu = 2.23
epsilonL = 3.139e-05
Eth = 18.4

Fit range

E = 18.4 – 100000