{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ni", "surface_phase": "pc", "species": {"text": "O+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"18.4": {"P": 7.165e-38}, "21.93": {"P": 0.0001718}, "26.13": {"P": 0.001172}, "31.15": {"P": 0.004201}, "37.12": {"P": 0.01146}, "44.24": {"P": 0.0265}, "52.73": {"P": 0.05391}, "62.85": {"P": 0.09754}, "74.91": {"P": 0.1574}, "89.29": {"P": 0.2279}, "106.4": {"P": 0.3011}, "126.8": {"P": 0.3706}, "151.2": {"P": 0.434}, "180.2": {"P": 0.4914}, "214.8": {"P": 0.5446}, "256.0": {"P": 0.5949}, "305.1": {"P": 0.6436}, "363.6": {"P": 0.6916}, "433.4": {"P": 0.7393}, "516.5": {"P": 0.7869}, "615.6": {"P": 0.8344}, "733.8": {"P": 0.8817}, "874.5": {"P": 0.9287}, "1042.0": {"P": 0.975}, "1242.0": {"P": 1.02}, "1481.0": {"P": 1.064}, "1765.0": {"P": 1.107}, "2103.0": {"P": 1.147}, "2507.0": {"P": 1.184}, "2988.0": {"P": 1.218}, "3561.0": {"P": 1.249}, "4245.0": {"P": 1.276}, "5059.0": {"P": 1.298}, "6030.0": {"P": 1.314}, "7187.0": {"P": 1.325}, "8566.0": {"P": 1.331}, "10210.0": {"P": 1.329}, "12170.0": {"P": 1.321}, "14500.0": {"P": 1.306}, "17290.0": {"P": 1.284}, "20600.0": {"P": 1.254}, "24560.0": {"P": 1.219}, "29270.0": {"P": 1.177}, "34880.0": {"P": 1.13}, "41580.0": {"P": 1.078}, "49550.0": {"P": 1.022}, "59060.0": {"P": 0.9628}, "70390.0": {"P": 0.902}, "83900.0": {"P": 0.8402}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2107, "q": 3.403, "mu": 2.23, "epsilonL": 3.139e-05, "Eth": 18.4}, "E_min": 18.4, "E_max": 100000}}]}