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Plasma-Surface Interaction Data Set 281

Sputtering of H+ on Ni(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Ni(pc) at 300 K

angle = 0.0 deg E /eV P
72.90.0
84.482.479e-05
97.90.0001333
113.50.0003968
131.50.0009122
152.40.001779
176.60.003047
204.60.00465
237.10.0064
274.80.008068
318.40.009489
369.00.0106
427.60.01143
495.50.01202
574.20.01242
665.50.01269
771.20.01284
893.70.01291
1036.00.01289
1200.00.01282
1391.00.01268
1612.00.01249
1868.00.01224
2164.00.01195
2508.00.01161
2907.00.01123
3368.00.01082
3903.00.01037
4523.00.009904
5242.00.009416
6074.00.008915
7039.00.008406
8158.00.007896
9453.00.007388
10960.00.006888
12700.00.006399
14710.00.005926
17050.00.00547
19760.00.005034
22900.00.004619
26530.00.004228
30750.00.00386
35630.00.003515
41290.00.003194
47850.00.002897
55450.00.002621
64260.00.002368
74460.00.002135
86290.00.001922

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 72.9 – 100000