{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ni", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"72.9": {"P": 0}, "84.48": {"P": 2.479e-05}, "97.9": {"P": 0.0001333}, "113.5": {"P": 0.0003968}, "131.5": {"P": 0.0009122}, "152.4": {"P": 0.001779}, "176.6": {"P": 0.003047}, "204.6": {"P": 0.00465}, "237.1": {"P": 0.0064}, "274.8": {"P": 0.008068}, "318.4": {"P": 0.009489}, "369.0": {"P": 0.0106}, "427.6": {"P": 0.01143}, "495.5": {"P": 0.01202}, "574.2": {"P": 0.01242}, "665.5": {"P": 0.01269}, "771.2": {"P": 0.01284}, "893.7": {"P": 0.01291}, "1036.0": {"P": 0.01289}, "1200.0": {"P": 0.01282}, "1391.0": {"P": 0.01268}, "1612.0": {"P": 0.01249}, "1868.0": {"P": 0.01224}, "2164.0": {"P": 0.01195}, "2508.0": {"P": 0.01161}, "2907.0": {"P": 0.01123}, "3368.0": {"P": 0.01082}, "3903.0": {"P": 0.01037}, "4523.0": {"P": 0.009904}, "5242.0": {"P": 0.009416}, "6074.0": {"P": 0.008915}, "7039.0": {"P": 0.008406}, "8158.0": {"P": 0.007896}, "9453.0": {"P": 0.007388}, "10960.0": {"P": 0.006888}, "12700.0": {"P": 0.006399}, "14710.0": {"P": 0.005926}, "17050.0": {"P": 0.00547}, "19760.0": {"P": 0.005034}, "22900.0": {"P": 0.004619}, "26530.0": {"P": 0.004228}, "30750.0": {"P": 0.00386}, "35630.0": {"P": 0.003515}, "41290.0": {"P": 0.003194}, "47850.0": {"P": 0.002897}, "55450.0": {"P": 0.002621}, "64260.0": {"P": 0.002368}, "74460.0": {"P": 0.002135}, "86290.0": {"P": 0.001922}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.6039, "q": 0.0334, "mu": 2.012, "epsilonL": 0.0003573, "Eth": 72.9}, "E_min": 72.9, "E_max": 100000}}]}