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Plasma-Surface Interaction Data Set 280

Sputtering of Xe+ on Co(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe+ on Co(pc) at 300 K

angle = 0.0 deg E /eV P
32.080.0
37.816.747e-05
44.560.0004213
52.50.001424
61.870.003743
72.910.008558
85.920.01784
101.30.03467
119.30.06339
140.60.1092
165.70.177
195.30.269
230.10.3832
271.10.5135
319.50.6526
376.50.7945
443.70.9359
522.91.076
616.21.217
726.11.36
855.71.506
1008.01.658
1188.01.817
1400.01.983
1650.02.158
1944.02.341
2291.02.534
2700.02.736
3182.02.948
3750.03.169
4419.03.398
5207.03.636
6136.03.881
7231.04.133
8521.04.391
10040.04.653
11830.04.919
13940.05.187
16430.05.456
19360.05.723
22820.05.988
26890.06.248
31690.06.501
37340.06.745
44000.06.978
51860.07.198
61110.07.401
72010.07.587
84860.07.752

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 32.08 – 100000