{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Co", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"32.08": {"P": 0}, "37.81": {"P": 6.747e-05}, "44.56": {"P": 0.0004213}, "52.5": {"P": 0.001424}, "61.87": {"P": 0.003743}, "72.91": {"P": 0.008558}, "85.92": {"P": 0.01784}, "101.3": {"P": 0.03467}, "119.3": {"P": 0.06339}, "140.6": {"P": 0.1092}, "165.7": {"P": 0.177}, "195.3": {"P": 0.269}, "230.1": {"P": 0.3832}, "271.1": {"P": 0.5135}, "319.5": {"P": 0.6526}, "376.5": {"P": 0.7945}, "443.7": {"P": 0.9359}, "522.9": {"P": 1.076}, "616.2": {"P": 1.217}, "726.1": {"P": 1.36}, "855.7": {"P": 1.506}, "1008.0": {"P": 1.658}, "1188.0": {"P": 1.817}, "1400.0": {"P": 1.983}, "1650.0": {"P": 2.158}, "1944.0": {"P": 2.341}, "2291.0": {"P": 2.534}, "2700.0": {"P": 2.736}, "3182.0": {"P": 2.948}, "3750.0": {"P": 3.169}, "4419.0": {"P": 3.398}, "5207.0": {"P": 3.636}, "6136.0": {"P": 3.881}, "7231.0": {"P": 4.133}, "8521.0": {"P": 4.391}, "10040.0": {"P": 4.653}, "11830.0": {"P": 4.919}, "13940.0": {"P": 5.187}, "16430.0": {"P": 5.456}, "19360.0": {"P": 5.723}, "22820.0": {"P": 5.988}, "26890.0": {"P": 6.248}, "31690.0": {"P": 6.501}, "37340.0": {"P": 6.745}, "44000.0": {"P": 6.978}, "51860.0": {"P": 7.198}, "61110.0": {"P": 7.401}, "72010.0": {"P": 7.587}, "84860.0": {"P": 7.752}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2561, "q": 20.89, "mu": 2.143, "epsilonL": 1.433e-06, "Eth": 32.08}, "E_min": 32.08, "E_max": 100000}}]}